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Understanding Best Practices for Atom Probe Tomography Implant Analysis

Published online by Cambridge University Press:  23 November 2012

T.J. Prosa ,
D.J. Larson ,
D. Olson ,
D. Lawrence ,
K. Henry ,
E. Steel  and
I. Anderson
T.J. Prosa
Affiliation:
Cameca Instruments Inc., Madison, WI
D.J. Larson
Affiliation:
Cameca Instruments Inc., Madison, WI
D. Olson
Affiliation:
Cameca Instruments Inc., Madison, WI
D. Lawrence
Affiliation:
Cameca Instruments Inc., Madison, WI
K. Henry
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD
E. Steel
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD
I. Anderson
Affiliation:
National Institute of Standards and Technology, Gaithersburg, MD
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 986 - 987
Copyright
Copyright © Microscopy Society of America 2012

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