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Ultra High Solid Angle EDS System Advanced STEM Analysis for FE-SEM

Published online by Cambridge University Press:  27 August 2014

Y. Nakajima
Affiliation:
JEOL.ltd, 3-1-2 Musashino, Akisima, Tokyo 196-8558 JAPAN
M. Suzuki
Affiliation:
Thermo Fisher Scientific K.K C-2F, 3-9 Moriya, Kanagawa, Yokohama 221-0022 JAPAN
S. Asahina
Affiliation:
JEOL.ltd, 3-1-2 Musashino, Akisima, Tokyo 196-8558 JAPAN
N. Kikuchi
Affiliation:
JEOL.ltd, 3-1-2 Musashino, Akisima, Tokyo 196-8558 JAPAN
K. Kawauchi
Affiliation:
JEOL.ltd, 3-1-2 Musashino, Akisima, Tokyo 196-8558 JAPAN
M. Shibata
Affiliation:
JEOL USA Inc. 11 Dearborn RD, Peabody, MA, 01960, USA
N. Erdman
Affiliation:
JEOL USA Inc. 11 Dearborn RD, Peabody, MA, 01960, USA
T Nokuo
Affiliation:
JEOL.ltd, 3-1-2 Musashino, Akisima, Tokyo 196-8558 JAPAN
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Abstract

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Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Reimer, L. Scanning Electron Microscopy: Physics of Image Formation and Microanalysis, second ed., Springer, Berlin, New York, 312-314, (1998).
[2] Lyman, C. E., et al, High-performance X-ray detection in a new analytical electron microscope. Journal of Microscopy. 176, 2, p 85–98, Nov. (1994).
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