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Tuning High Order Geometric Aberrations in Quadrupole-Octupole Correctors

Published online by Cambridge University Press:  27 August 2014

N. Dellby ,
G.J. Corbin ,
Z. Dellby ,
T.C. Lovejoy ,
Z.S. Szilagyi ,
M.F. Chisholm  and
O.L. Krivanek
N. Dellby
Affiliation:
Nion Co., 1102 Eighth St, Kirkland, WA 98033, USA
G.J. Corbin
Affiliation:
Nion Co., 1102 Eighth St, Kirkland, WA 98033, USA
Z. Dellby
Affiliation:
Nion Co., 1102 Eighth St, Kirkland, WA 98033, USA
T.C. Lovejoy
Affiliation:
Nion Co., 1102 Eighth St, Kirkland, WA 98033, USA
Z.S. Szilagyi
Affiliation:
Nion Co., 1102 Eighth St, Kirkland, WA 98033, USA
M.F. Chisholm
Affiliation:
Materials Science and Technology Division, Oak Ridge National Lab., Oak Ridge, TN 37831, USA
O.L. Krivanek
Affiliation:
Nion Co., 1102 Eighth St, Kirkland, WA 98033, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 928 - 929
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Haider, M, et al., Ultramicroscopy108 (2008) 167-178.Google Scholar
[2] Kieslowski, C, et al., Microsc. Microanal. 14 (2008) 469–477.Google Scholar
[3] Krivanek, OL, et al., Microscopy 62 (2013) 3–21.Google Scholar
[4] Dellby, N, Krivanek, OL andMurfitt, MF Phys. Procedia 1 (2008) 179-180.Google Scholar
[5] Sawada, H, et al., Micron, in press (2014) http://dx.doi.org/10.1016/j.micron.2014.01.007.Google Scholar
[6] Krivanek, OL, Dellby, N and Murfitt, MF in: Handbook of Charged Particle Optics (2nd edition),(Orloff J., ed. Boca Raton: CRC Press, 2009) 601-640.Google Scholar
[7] Shao, Z, Beck, V and Crewe, AV J. Appl. Phys. 64 (1988) 1646-1651.Google Scholar
[8] MFC is supported by the U.S. DOE, Basic Energy Sciences, MSE Division.Google Scholar
[9] YAlO3 sample courtesy Scintillation Materials Research Center at the University of Tennessee.Google Scholar