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Trace Element Analysis under 100 ppm and Chemical State Analysis in Small Area using Wavelength Dispersive Soft X-ray Emission Spectrometer in FE-SEM

Published online by Cambridge University Press:  23 September 2015

H. Takahashi ,
S. Asahina ,
M. Terauchi ,
C. Nielsen  and
P. McSwiggen
H. Takahashi
Affiliation:
Global business promotion division, JEOL Ltd., 13F, Otemachi Nomura Bld. 2-1-1 Otemachi, Chiyoda-ku, Tokyo, 100-0004Japan
S. Asahina
Affiliation:
SM business unit JEOL Ltd., 1-2 Musashino, 3-chome, Akishima, Tokyo 196-8558, Japan
M. Terauchi
Affiliation:
Institute for Multidisciplinary Research for Advanced Materials, Tohoku University, Sendai 980-8577, Japan
C. Nielsen
Affiliation:
JEOL USA, 11 Deaborn Rd. Peabody, MA01960, ISA
P. McSwiggen
Affiliation:
JEOL USA, 11 Deaborn Rd. Peabody, MA01960, ISA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1635 - 1636
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Terauchi, M., et al., J. Electron Microscopy 61, 1 (2012).Google Scholar
[2] Imazono, T., et al., Appl. Opt 51, 2351 (2012).Google Scholar
[3] Takahashi, H., et al, Microscopy and Microanalysis 19(supple. 2), 1258 (2013).Google Scholar
[4] Takahashi, H., et al., Microscopy and Microanalysis 20(supple. 3), 684 (2014).CrossRefGoogle Scholar