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Tomographic measurement of buried interface roughness

Published online by Cambridge University Press:  23 September 2015

Misa Hayashida ,
Shinichi Ogawa  and
Marek Malac
Misa Hayashida
Affiliation:
National Institute for Nanotechnology (NINT), Edmonton, Alberta, Canada.
Shinichi Ogawa
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, Japan.
Marek Malac
Affiliation:
National Institute for Nanotechnology (NINT), Edmonton, Alberta, Canada. Department of Physics, University of Alberta, Edmonton, Alberta, Canada.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 2243 - 2244
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Hayashida, M., et. al., Ultramicroscopy Vol 144 (2014) 50–57.Google Scholar
[2] Bergen, M., et. al., Microscopy and Microanalysis 19(S2 (2013) 1394–1395.CrossRefGoogle Scholar