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Three-dimensional Microanalysis Using FIB SEM: Variations in Technique

Published online by Cambridge University Press:  26 July 2009

K Scott
Affiliation:
National Institute of Standards and Technology
JM Davis
Affiliation:
National Institute of Standards and Technology
EP Vicenzi
Affiliation:
Smithsonian Institution

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2009