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Three Dimensional Local Electrode Atom Probe Analysis of Microtips Fabricated on a Planar Specimen Utilizing a Broad Ion Beam

Published online by Cambridge University Press:  01 August 2005

R W O'Neill ,
T F Kelly ,
R M Martens ,
D J Larson ,
S A Wiener ,
R M Ulfig ,
M Ali  and
D A Reinhard
R W O'Neill
Affiliation:
Imago Scientific Instruments,Inc.,Madison Area Technical College
T F Kelly
Affiliation:
Imago Scientific Instruments,Inc.
R M Martens
Affiliation:
Imago Scientific Instruments,Inc.
D J Larson
Affiliation:
Imago Scientific Instruments,Inc.
S A Wiener
Affiliation:
Imago Scientific Instruments,Inc.
R M Ulfig
Affiliation:
Imago Scientific Instruments,Inc.
M Ali
Affiliation:
Imago Scientific Instruments,Inc.
D A Reinhard
Affiliation:
Imago Scientific Instruments,Inc.

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Information
Microscopy and Microanalysis , Volume 11 , Issue S02 , August 2005 , pp. 884 - 885
Copyright
© 2005 Microscopy Society of America