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TEM Characterisation of Indented TiN/SiNx Multilayered Coatings

Published online by Cambridge University Press:  07 September 2007

M Parlinska-Wojtan ,
J C Cancio ,
S Meier  and
J Patscheider
M Parlinska-Wojtan
Affiliation:
EMPA,Switzerland
J C Cancio
Affiliation:
EMPA,Switzerland
S Meier
Affiliation:
EMPA,Switzerland
J Patscheider
Affiliation:
EMPA,Switzerland
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Extract

Extended abstract of a paper presented at MC 2007, 33rd DGE Conference in Saarbrücken, Germany, September 2 – September 7, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S03 , September 2007 , pp. 384 - 385
Copyright
Copyright © Microscopy Society of America 2007

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