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Sub-angstrom Spatial Resolution in Secondary-electron Imaging Achieved with an Aberration Corrected Scanning Electron Microscope

Published online by Cambridge University Press:  01 August 2010

H Inada ,
D Su ,
M Konno ,
K Nakamura ,
RF Egerton ,
J Wall  and
Y Zhu
H Inada
Affiliation:
Hitachi High Technologies Corp, Japan
D Su
Affiliation:
Brookhaven National Laboratory
M Konno
Affiliation:
Hitachi High Technologies Corp, Japan
K Nakamura
Affiliation:
Hitachi High Technologies Corp, Japan
RF Egerton
Affiliation:
University Alberta, Canada
J Wall
Affiliation:
Brookhaven National Laboratory
Y Zhu
Affiliation:
Brookhaven National Laboratory

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 610 - 611
Copyright
Copyright © Microscopy Society of America 2010