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A Study of low or ultra-low voltage SEM imaging for mesoporous materials

Published online by Cambridge University Press:  03 August 2008

S Takeuchi
Affiliation:
Hitachi High-Technologies Corporation, Japan
A Miyaki
Affiliation:
Hitachi High-Technologies Corporation, Japan
H Ito
Affiliation:
Hitachi High-Technologies Corporation, Japan
T Sawahata
Affiliation:
Hitachi High-Technologies Corporation, Japan
M Nakagawa
Affiliation:
Hitachi High-Technologies Corporation, Japan
S Kataoka
Affiliation:
National Institute of Advanced Industrial Science and Technology, Japan
Y Inagi
Affiliation:
National Institute of Advanced Industrial Science and Technology, Japan
A Endo
Affiliation:
National Institute of Advanced Industrial Science and Technology, Japan
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Copyright
© 2008 Microscopy Society of America

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