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Structural Switch of AlN Sputtered Thin Films From (101) to (002) Orientation, Driven by the Growth Kinetics

Published online by Cambridge University Press:  04 August 2017

A. Taurino ,
M.A. Signore ,
M. Catalano  and
M. J. Kim
A. Taurino
Affiliation:
CNR IMM, Institute for Microelectronics and Microsystems, Via Monteroni, Lecce, Italy
M.A. Signore
Affiliation:
CNR IMM, Institute for Microelectronics and Microsystems, Via Monteroni, Lecce, Italy
M. Catalano
Affiliation:
CNR IMM, Institute for Microelectronics and Microsystems, Via Monteroni, Lecce, Italy Dep. of Materials Science and Engineering, Univ. of Texas at Dallas, Richardson, Texas, USA
M. J. Kim
Affiliation:
Dep. of Materials Science and Engineering, Univ. of Texas at Dallas, Richardson, Texas, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 1496 - 1497
Copyright
© Microscopy Society of America 2017 

References

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