Hostname: page-component-8448b6f56d-gtxcr Total loading time: 0 Render date: 2024-04-24T13:55:52.768Z Has data issue: false hasContentIssue false
  • English
  • Français

Smart Automation: Machine Learning Enabled Workflow for Logic and DRAM

Published online by Cambridge University Press:  30 July 2021

John Flanagan ,
Ashley Sixtos ,
Chris Hakala ,
Justin Roller  and
Hayley Johanesen
John Flanagan
Affiliation:
Thermo Fisher Scientific, United States
Ashley Sixtos
Affiliation:
Thermo Fisher Scientific, United States
Chris Hakala
Affiliation:
Thermo Fisher Scientific, United States
Justin Roller
Affiliation:
Thermo Fisher Scientific, United States
Hayley Johanesen
Affiliation:
Thermo Fisher Scientific, United States

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Full System and Workflow Automation for Enabling Big Data and Machine Learning in Electron Microscopy
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 60 - 61
Check for updates
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Johanesen, Hayley, Strauss, Michael, Kenslea, Anne, Hakala, Chris, Kwakman, Laurens, Boullart, Werner, Mertens, Hans, Siew, Yong Kong, and Barla, Kathy "Evaluation of the accuracy and precision of STEM and EDS metrology on horizontal GAA nanowire devices", Proc. SPIE 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII, 109591C (26 March 2019); https://doi.org/10.1117/12.2514995CrossRefGoogle Scholar
Long, Jonathan, Shelhamer, Evan, Darrell, Trevor. “Fully Convolutional Networks for Semantic Segmentation”, Cornell University, Computer Science, Computer Vision and Pattern Recognition, print 1411.4038 (8 March 2015); https://arxiv.org/abs/1411.4038CrossRefGoogle Scholar
Jansen, J., Otten, M.T., Zandbergen, H.W., “Towards automatic alignment of a crystalline sample in an electron microscope along a zone axis”, Ultramicroscopy, Volume 125 (2013), Pages 59-65, ISSN 0304-3991; https://doi.org/10.1016/j.ultramic.2012.09.010. (https://www.sciencedirect.com/science/article/pii/S0304399112002458)CrossRefGoogle Scholar