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SESAM: Exploring the Frontiers of Electron Microscopy

Published online by Cambridge University Press:  11 October 2006

Christoph T. Koch ,
Wilfried Sigle ,
Rainer Höschen ,
Manfred Rühle ,
Erik Essers ,
Gerd Benner  and
Marko Matijevic
Christoph T. Koch
Affiliation:
Max Planck Institut für Metallforschung, Heisenbergstr. 3, D-70569 Stuttgart, Germany
Wilfried Sigle
Affiliation:
Max Planck Institut für Metallforschung, Heisenbergstr. 3, D-70569 Stuttgart, Germany
Rainer Höschen
Affiliation:
Max Planck Institut für Metallforschung, Heisenbergstr. 3, D-70569 Stuttgart, Germany
Manfred Rühle
Affiliation:
Max Planck Institut für Metallforschung, Heisenbergstr. 3, D-70569 Stuttgart, Germany
Erik Essers
Affiliation:
Carl Zeiss SMT-NTS Division, Carl-Zeiss-Str. 56, 73447 Oberkochen, Germany
Gerd Benner
Affiliation:
Carl Zeiss SMT-NTS Division, Carl-Zeiss-Str. 56, 73447 Oberkochen, Germany
Marko Matijevic
Affiliation:
Carl Zeiss SMT-NTS Division, Carl-Zeiss-Str. 56, 73447 Oberkochen, Germany
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Abstract

We report on the sub-electron-volt-sub-angstrom microscope (SESAM), a high-resolution 200-kV FEG-TEM equipped with a monochromator and an in-column MANDOLINE filter. We report on recent results obtained with this instrument, demonstrating its performance (e.g., 87-meV energy resolution at 10-s exposure time, or a transmissivity of the energy filter of T1 eV = 11,000 nm2). New opportunities to do unique experiments that may advance the frontiers of microscopy in areas such as energy-filtered TEM, spectroscopy, energy-filtered electron diffraction and spectroscopic profiling are also discussed.

Keywords

energy-filtered TEMEELSenergy-filtered electron diffractionenergy filter aberrations
Type
Research Article
Information
Microscopy and Microanalysis , Volume 12 , Issue 6: Special Issue: Frontiers of Electron Microscopy in Materials Science , December 2006 , pp. 506 - 514
Copyright
© 2006 Microscopy Society of America

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References

REFERENCES

Benner, G., Matijevic, M., Stegmann, H., Schlossmacher, P., Haider, M., Uhlemann, S., & Schwan, E. (2006). In Proceedings of the 16th International Microscopy Congress (IMC-16), Iijima, S. (Ed.), (CD-ROM p. I20-03). Tokyo, Japan: Japanese Society of Electron Microscopy.
Benner, G. & Probst, W. (1994). Köhler illumination in the TEM-fundamentals and advantages. J Microsc 174, 133–142.Google Scholar
Bockelmann, U. & Bastard, G. (1990). Phonon-scattering and energy relaxation in 2-dimensional, one-dimensional, and zero-dimensional electron gases. Phys Rev B 42, 8947–8951.Google Scholar
Cockayne, D.J.H. & McKenzie, D.R. (1988). Electron diffraction analysis of polycrystalline and amorphous thin films. Acta Crystallogr A 44, 870–878.Google Scholar
Cockayne, D., McKenzie, D., & Muller, D. (1991). Electron diffraction of amorphous thin films using peels. Microsc Microanal Microstruct 2, 359–366.Google Scholar
Essers, E., Benner, G., Orchowski, A., Kappel, R., & Trunz, M. (2002). New approach for ultra-stable TEM-column support frame. Proceedings of the 15th International Congress on Electron Microscopy, vol. 3 Cross, R. (Ed.), (CD-ROM pp. 355–356). Onderstepoort, South Africa: Microscopy Society of Southern Africa.
Essers, E., Höschen, R., Matijevic, M., Benner, G., & Koch, C. (2006). In Proceedings of the 16th International Microscopy Congress (IMC-16), Iijima, S. (Ed.), (CD-ROM p. I9-03). Tokyo, Japan: Japanese Society of Electron Microscopy.
Fienup, J.R. (1982). Phase retrieval algorithms—A comparison. Appl Optics 21, 2758–2769.Google Scholar
Gloter, A., Douriri, A., Tence, M., & Colliex, C. (2002). Improving energy resolution of EELS spectra: An alternative to the monochromator solution. Ultramicroscopy 96, 385–400.Google Scholar
Höschen, R., Sigle, W., & Phillipp, F. (1996). A drift compensating system for transmission electron microscopes. In Proceedings of the 11th European Congress on Electron Microscopy (EUREM), Belfield, U.C. (Ed.), (CD-ROM pp. 373–374). Dublin, Ireland: EUREM.
Ibach, H. (1971). Optical surface phonons in zinc oxide detected by slow-electron spectroscopy. Phys Rev Lett 24, 1416–1418.Google Scholar
Ibach, H. & Mills, D.L. (1982). Electron Energy Loss Spectroscopy and Surface Vibrations. San Francisco: Academic.
Kahl, F. & Rose, H. (1996). Design of an electron monochromator with small Boersch effect. In Proceedings of the 11th European Congress on Electron Microscopy (EUREM), Belfield, U.C. (Ed.), (CD-ROM pp. 478–479). Dublin, Ireland: EUREM.
Kesmodel, L. (1998). Application of high-resolution electron energy loss spectroscopy to technical surfaces. Langmuir 14, 1355–1360.Google Scholar
Koch, C.T. (2005). Imaging grain boundary segregation by electron diffractive imaging. Zeitschr f Metallkunde 96, 443–447.Google Scholar
Kothleitner, G. & Hofer, F. (2003). EELS performance on a new high energy resolution imaging filter. Micron 34, 211.Google Scholar
Lucy, L.B. (1974). An iterative technique for the rectification of observed distributions. Astrophys J 79, 745–755.Google Scholar
Marchesini, S., He, H., Chapman, H., Hauriege, S., Noy, A., Howells, M., Weierstall, U., & Spence, J. (2003). X-ray image reconstruction from a diffraction pattern alone. Phys Rev B 68 (140101), pp. 1–4.Google Scholar
McBride, W.E. & Cockayne, D.J.H. (2003). The structure of nanovolumes of amorphous materials. J Non-Crystall Solids 328, 233–238.Google Scholar
Midgley, P. (1999). A simple new method to obtain high angular resolution ω-q patterns. Ultramicroscopy 76, 91–96.Google Scholar
Morniroli, J.P. (2002). Large-Angle Convergent-Beam Electron Diffraction (LACBED): Applications to crystal defects. Paris: French Society of Microscopies.
Muller, D., Edwards, B., Kirkland, E., & Silcox, J. (2001). Simulation of thermal diffuse scattering including a detailed phonon dispersion curve. Ultramicroscopy 86, 371–380.Google Scholar
Oszlanyi, G. & Suto, A. (2004). Ab initio structure solution by charge flipping. Acta Crystallogr A 60, 134.Google Scholar
Quandt, E., Barre, S.L., & Niedrig, H. (1990). Direct parallel detection of energy-resolved large-angle convergent-beam patterns. Ulramicroscopy 33, 15–21.Google Scholar
Reimer, L. (1992). Energy-filtering transmission electron microscopy in materials science. Microsc Microanal Microstruct 3, 141.Google Scholar
Richardson, W.H. (1972). Bayesian-based iterative method of image restoration. J Opt Soc Am 62, 55–59.Google Scholar
Rose, H. (1999). Prospects for realizing a sub-Ångstrom sub-eV resolution EFTEM. Ultramicroscopy 78, 13–25.Google Scholar
Rossouw, C., Forwood, C., Gibson, M., & Miller, P. (1996). Statistical ALCHEMI: General formulation and method with application to Ti-Al ternary alloys. Phil Mag A 74, 57–76.Google Scholar
Ruf, T. (2003). Inelastic X-ray spectroscopy: New possibilities for raman spectroscopy. Appl Phys A 76, 21–26.Google Scholar
Sigle, W., Krämer, S., Varshney, V., Zern, A., Eigenthaler, U., & Rühle, M. (2003). Plasmon energy mapping in energy-filtering transmission electron microscopy. Ultramicroscopy 96, 565–571.Google Scholar
Sigle, W., Zern, A., Hahn, K., Eigenthaler, U., & Rühle, M. (2001). J Electron Microsc 50, 509–515.
Spence, J.C.H. & Koch, C.T. (2001). Atomic string holography. Phys Rev Lett 86, 5510–5513.Google Scholar
Spence, J.C.H. & Tafto, J. (1983). ALCHEMI—A new technique for locating atoms in small crystals. J Microsc 130, 147–154.Google Scholar
Suzuki, K., Terauchi, M., Uemichi, Y., & Kijima, K. (2005). High energy-resolution electron energy-loss spectroscopy study of electronic structures of barium titanate nanocrystals. Jpn J Appl Phys 44, 7593–7597.Google Scholar
Tanaka, M., Saito, R., & Harada, Y. (1980). Large-angle convergent beam electron diffraction. J Electron Microsc 29, 408–412.Google Scholar
Uhlemann, S. & Rose, H. (1994). The MANDOLINE filter—A new high-performance imaging filter for sub-eV EFTEM. Optik 96, 163.Google Scholar
Uhlemann, S. & Rose, H. (1996). Acceptance of imaging energy filters. Ultramicroscopy 63, 161–167.Google Scholar
Urayama, J., Norris, T.B., Singh, J., & Bhattacharya, P. (2001). Observation of phonon bottleneck in quantum dot electronic relaxation. Phys Rev Lett 86, 4930–4933.Google Scholar
Vincent, R. & Silcox, J. (1973). Dispersion of radiative surface plasmons in aluminum films by electron scattering. Phys Rev Lett 31, 1487–1490.Google Scholar
Walther, T. & Mader, W. (1999). Application of spatially resolved electron energy-loss spectroscopy to the quantitative analysis of semiconducting layer structures. Inst Conf Ser 164, 121–128.Google Scholar
Weickenmeier, A., Quandt, E., Kohl, H., Rose, H., & Niedrig, H. (1993). Computation and measurement of characteristic energy-loss large-angle convergent-beam patterns of molybdenum selenide. Ultramicroscopy 49, 210–219.Google Scholar
Wu, J.S., Weierstall, U., Spence, J.C.H., & Koch, C.T. (2004). Iterative phase retrieval without support. Optics Lett 29, 2737–2739.Google Scholar
Zuo, J.M., McCartney, M.R., & Spence, J.C.H. (1996). Performance of imaging plates for electron recording. Ultramicroscopy 66, 35–47.Google Scholar
Zuo, J.M., Vartanyants, I., Gao, M., Zhang, R., & Nagahara, L.A. (2003). Atomic resolution imaging of a carbon nanotube from diffraction intensities. Science 300, 1419–1421.Google Scholar