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SEM Autofocusing and Astigmatism Correction using FFT and GPGPU techniques

Published online by Cambridge University Press:  09 October 2013

N.H. Caldwell
Affiliation:
A.J. Marshall
Affiliation:
B.C. Breton
Affiliation:
D.M. Holburn
Affiliation:

Abstract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2013 in Indianapolis, Indiana, USA, August 4 – August 8, 2013.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2013