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Roles of self-assembly and beam damage in gas-assisted electron and ion beam induced processing

Published online by Cambridge University Press:  23 September 2015

Milos Toth*
Affiliation:
School of Physics and Advanced Materials, University of Technology, Sydney, 15 Broadway, Ultimo, New South Wales 2007, Australia

Abstract

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Type
Abstract
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

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