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Resolution Enhancement at Low-Accelerating-Voltage by Improvements of Diffraction Limit and Chromatic Aberration

Published online by Cambridge University Press:  27 August 2014

H. Sawada
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan
T. Sasaki
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan
F. Hosokawa
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan
K. Suenaga
Affiliation:
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, 305-8565, Japan

Abstract

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Type
Abstract
Copyright
Copyright © Microscopy Society of America 2014 

References

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