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Recent Achievements of Electron Beam Deceleration Method for FE-SEM Enhanced Elemental Analysis including Soft X-ray Emission Spectroscopy

Published online by Cambridge University Press:  27 August 2014

S. Asahina ,
Y. Sakuda ,
T. Murano ,
H. Takahashi ,
N. Kikuchi ,
K. Kawauchi ,
T. Nokuo ,
F. Schüth  and
O. Terasaki
S. Asahina
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan
Y. Sakuda
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan
T. Murano
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan
H. Takahashi
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan
N. Kikuchi
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan
K. Kawauchi
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan
T. Nokuo
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, 196-8558, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 686 - 687
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Terasaki, O, et al., JEOL News. 48, 21-31 (2013).Google Scholar
[2] Suga, M., et al., accepted to Progress in Solid State Chemistry.Google Scholar
[3] Terauchi, M, et al., J. Electron Microscopy, 61, 1 (2012).Google Scholar
[4] Takahashi, H, et al., Microscopy and Microanalysis, 16 (supple. 2), 342010).Google Scholar