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Realization of a Field Emission Gun with Advanced Köhler Illumination

Published online by Cambridge University Press:  01 August 2002

Gerd Benner
Affiliation:
LEO Elektronenmikroskopie GmbH, D-73446 Oberkochen, Germany CEOS GmbH, D-69126 Heidelberg, Englerstraße 28, Germany
Günter Lang
Affiliation:
LEO Elektronenmikroskopie GmbH, D-73446 Oberkochen, Germany CEOS GmbH, D-69126 Heidelberg, Englerstraße 28, Germany
Alexander Orchowski
Affiliation:
LEO Elektronenmikroskopie GmbH, D-73446 Oberkochen, Germany CEOS GmbH, D-69126 Heidelberg, Englerstraße 28, Germany
Wolf-Dieter Rau
Affiliation:
LEO Elektronenmikroskopie GmbH, D-73446 Oberkochen, Germany
Max Haider
Affiliation:
CEOS GmbH, D-69126 Heidelberg, Englerstraße 28, Germany
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Copyright © Microscopy Society of America 2002
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