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Radial Distribution Function Analyses of Amorphous Carbon Films Containing Silicon and Hydrogen by Energy-Filtered Diffraction and EXELFS

Published online by Cambridge University Press:  01 August 2005

J Bentley
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, Tennessee
R D Evans
Affiliation:
Case Western Reserve University, Cleveland, Ohio The Timken Company, Canton, Ohio
K L More
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, Tennessee
D W Coffey
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, Tennessee
G L Doll
Affiliation:
The Timken Company, Canton, Ohio
J T Glass
Affiliation:
The Timken Company, Canton, Ohio Duke University, Durham, North Carolina

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2005 in Honolulu, Hawaii, USA, July 31--August 4, 2005

Type
Research Article
Copyright
© 2005 Microscopy Society of America