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Quantification of Composition of Epitaxial Si/SiGe by EELS
Published online by Cambridge University Press: 01 August 2018
Abstract
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- Type
- Abstract
- Information
- Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 472 - 473
- Copyright
- © Microscopy Society of America 2018
References
[2] Mitchell, D.R.G.
www.dmscripting.com
v2.1 Sept 2012, Mean Free Path Estimator, plugin for Digital Micrograph Software.Google Scholar
[3] The authors acknowledge Michael Hollner, Mark Hudson for preparation of TEM samples.Google Scholar