Hostname: page-component-8448b6f56d-tj2md Total loading time: 0 Render date: 2024-04-24T19:39:50.608Z Has data issue: false hasContentIssue false
  • English
  • Français

Quantification and Mitigation of Electron-Beam-Induced Carbon Contamination

Published online by Cambridge University Press:  30 July 2021

Milena Hugenschmidt ,
Katharina Adrion ,
Aaron Marx ,
Erich Müller  and
Dagmar Gerthsen
Milena Hugenschmidt
Affiliation:
Karlsruhe Institute of Technology, Laboratory for Electron Microscopy, Karlsruhe, Germany
Katharina Adrion
Affiliation:
Karlsruhe Institute of Technology (KIT), Laboratory for Electron Microscopy (LEM), Engesserstraße 7, 76131Karlsruhe, Germany, United States
Aaron Marx
Affiliation:
Karlsruhe Institute of Technology (KIT), Laboratory for Electron Microscopy (LEM), Engesserstraße 7, 76131Karlsruhe, Germany, United States
Erich Müller
Affiliation:
Karlsruhe Institute of Technology (KIT), Laboratory for Electron Microscopy (LEM), Engesserstraße 7, 76131Karlsruhe, Germany, United States
Dagmar Gerthsen
Affiliation:
Laboratorium für Elektronenmikroskopie, Karlsruher Institut für Technologie (KIT), Engesserstr. 7, 76131Karlsruhe, Germany, United States

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Advances in Analytical STEM-in-SEM
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 2022 - 2024
Check for updates
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Reimer, , Scanning Electron Microscopy Vol. 45, Springer (1998)CrossRefGoogle Scholar
Hirsch, et al. , Scanning 16, 101 (1993)CrossRefGoogle Scholar
Hettler, et al. , Micron 96, 38 (2017)CrossRefGoogle Scholar
Egerton, , Micron 119, 72 (2019)CrossRefGoogle Scholar
Mitchell, , Micron 73, 36 (2015)CrossRefGoogle Scholar
Müller, , Optik 33, 296 (1971)Google Scholar
We acknowledge funding by the Deutsche Forschungsgemeinschaft (DFG, German Research Foundation) under Germany's Excellence Strategy – 2082/1 – 390761711 and thank the Carl Zeiss Foundation for financial support.Google Scholar