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Prospects for Atom Probe Tomography of Commercial Semiconductor Devices

Published online by Cambridge University Press:  08 April 2017

D Larson ,
D Lawrence ,
D Olson ,
T Prosa ,
D Reinhard ,
R Ulfig ,
P Clifton ,
J Bunton ,
D Lenz  and
J Olson
...Show all authors
D Larson
Affiliation:
Cameca Instruments, Inc
D Lawrence
Affiliation:
Cameca Instruments, Inc
D Olson
Affiliation:
Cameca Instruments, Inc
T Prosa
Affiliation:
Cameca Instruments, Inc
D Reinhard
Affiliation:
Cameca Instruments, Inc
R Ulfig
Affiliation:
Cameca Instruments, Inc
P Clifton
Affiliation:
Cameca Instruments, Inc
J Bunton
Affiliation:
Cameca Instruments, Inc
D Lenz
Affiliation:
Cameca Instruments, Inc
J Olson
Affiliation:
Cameca Instruments, Inc
L Renaud
Affiliation:
Cameca SAS
I Martin
Affiliation:
Cameca SAS
T Kelly
Affiliation:
Cameca Instruments, Inc

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 752 - 753
Copyright
Copyright © Microscopy Society of America 2011