Hostname: page-component-848d4c4894-pjpqr Total loading time: 0 Render date: 2024-06-22T16:25:01.774Z Has data issue: false hasContentIssue false

Performance of Low-kV Aberration-corrected STEM with Delta-corrector and CFEG in Ultrahigh Vacuum Environment

Published online by Cambridge University Press:  04 August 2017

Takeo Sasaki
Affiliation:
EM Business unit, JEOL Ltd., Tokyo 196-8558, Japan
Shigeyuki Morishita
Affiliation:
EM Business unit, JEOL Ltd., Tokyo 196-8558, Japan
Yuji Kohno
Affiliation:
EM Business unit, JEOL Ltd., Tokyo 196-8558, Japan
Masaki Mukai
Affiliation:
EM Business unit, JEOL Ltd., Tokyo 196-8558, Japan
Koji Kimoto
Affiliation:
Research Center for Advanced Measurement and Characterization , National Institute for Materials Science (NIMS), Ibaraki 305-0044, Japan
Kazu Suenaga
Affiliation:

Abstract

Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Copyright
© Microscopy Society of America 2017 

References

[1] Sasaki, T., et al, J. Electron Microscopy 59 2010). p. S7.CrossRefGoogle Scholar
[2] Morishita, S., et al, Phys. Rev. Lett. 117 2016). p. 153004.CrossRefGoogle Scholar