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Performance Evaluation of Dual Bruker XFlash6 | 100 EDS Detector Integrated in FEI Themis With Analytical Objective Pole Piece

Published online by Cambridge University Press:  25 July 2016

Emrah Yücelen ,
Mikhail Ovsyanko ,
Dennis Cats ,
Marcel Niestadt ,
Michiel Oosting ,
Vincent Jongenelen ,
Heike Richter ,
Jeroen van Engelshoven  and
David Foord
Emrah Yücelen
Affiliation:
FEI Electron Optics B.V. , Achtseweg Noord 5, 5651 GG, Eindhoven, The Netherlands
Mikhail Ovsyanko
Affiliation:
FEI Electron Optics B.V. , Achtseweg Noord 5, 5651 GG, Eindhoven, The Netherlands
Dennis Cats
Affiliation:
FEI Electron Optics B.V. , Achtseweg Noord 5, 5651 GG, Eindhoven, The Netherlands
Marcel Niestadt
Affiliation:
FEI Electron Optics B.V. , Achtseweg Noord 5, 5651 GG, Eindhoven, The Netherlands
Michiel Oosting
Affiliation:
FEI Electron Optics B.V. , Achtseweg Noord 5, 5651 GG, Eindhoven, The Netherlands
Vincent Jongenelen
Affiliation:
FEI Electron Optics B.V. , Achtseweg Noord 5, 5651 GG, Eindhoven, The Netherlands
Heike Richter
Affiliation:
FEI Electron Optics B.V. , Achtseweg Noord 5, 5651 GG, Eindhoven, The Netherlands
Jeroen van Engelshoven
Affiliation:
FEI Electron Optics B.V. , Achtseweg Noord 5, 5651 GG, Eindhoven, The Netherlands
David Foord
Affiliation:
FEI Electron Optics B.V. , Achtseweg Noord 5, 5651 GG, Eindhoven, The Netherlands

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 52 - 53
Copyright
© Microscopy Society of America 2016 

References

[1] Schlossmacher, P, et al, Microscopy Today 18 (2010). p. 14.Google Scholar
[2] Egerton, RF & Cheng, SC Ultramicroscopy 55 (1994). p. 43.Google Scholar
[3] The authors acknowledge the support from Bruker Nano GmbH.Google Scholar