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PEC Reliability in 3D E-beam DOE Nanopatterning.

Published online by Cambridge University Press:  28 September 2015

Stanislav Krátký ,
Michal Urbánek  and
Vladimir Kolařík
Stanislav Krátký
Affiliation:
Institute of Scientific Instruments of the AS CR, v. v. i., Brno, Czech Republic
Michal Urbánek
Affiliation:
Institute of Scientific Instruments of the AS CR, v. v. i., Brno, Czech Republic
Vladimir Kolařík
Affiliation:
Institute of Scientific Instruments of the AS CR, v. v. i., Brno, Czech Republic

Abstract

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Type
Numerical Methods
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 230 - 235
Copyright
Copyright © Microscopy Society of America 2015 

References

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[10] The authors acknowledge funding from MEYS CR (project No. LO1212), the TACR project No. TE 01020233 and by the institutional support RVO: 68081731.Google Scholar