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The Path to Quantitative 3D Metrology: FIB-SEM 3D Tomography in Data Storage Industry

Published online by Cambridge University Press:  01 August 2018

Zhi-Peng Li ,
Jianxin Fang  and
Haifeng Wang
Zhi-Peng Li
Affiliation:
Materials Science Lab, Western Digital Corporation, Fremont, USA
Jianxin Fang
Affiliation:
Materials Science Lab, Western Digital Corporation, Fremont, USA
Haifeng Wang
Affiliation:
Materials Science Lab, Western Digital Corporation, Fremont, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 828 - 829
Copyright
© Microscopy Society of America 2018 

References

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