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Optimizing Van der Waals Forces For FIB ex situ Lift Out

Published online by Cambridge University Press:  04 August 2017

Lucille A. Giannuzzi
Affiliation:
EXpressLO LLC, Lehigh Acres, FL 33971USA.
Trevor Clark
Affiliation:
The Pennsylvania State University, University Park, PA 16802USA.

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2017 

References

[1] Giannuzzi, L.A., et al, Microsc. Microanal. 21 2015). p. 1032.Google Scholar
[2] Tracy, B., et al, Microsc. Microanal. 15(2 2009). p. 314.Google Scholar
[4] FIB work was performed on a FIB 200 in collaboration with TSS Microscopy.Google Scholar