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Optimized Electron Column and Detection Scheme for Advanced Imaging and Analysis of Metals

Published online by Cambridge University Press:  27 August 2014

David Wall ,
Fabian Cyril-Sasam ,
Tomas Vystavel  and
Petr Wandrol
David Wall
Affiliation:
FEI Company, Achtseweg Noord 5, 5651 GG, Eindhoven, The Netherlands
Fabian Cyril-Sasam
Affiliation:
FEI Company, Achtseweg Noord 5, 5651 GG, Eindhoven, The Netherlands
Tomas Vystavel
Affiliation:
FEI Company, Podnikatelska 6, 612 00 Brno, Czech Republic
Petr Wandrol
Affiliation:
FEI Company, Podnikatelska 6, 612 00 Brno, Czech Republic

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1102 - 1103
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Cazaux, J., et al, Ultramicroscopy 135 (2013) 43-49.Google Scholar
[2] Aoyama, T., et al, ISIJ International, vol. 51 (2011), No. 9, p. 1487-1491.Google Scholar