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A New In-situ Broad Ion Beam, With Energy Range 1 – 500 eV

Published online by Cambridge University Press:  27 August 2014

J.J.L. Mulders ,
P.H.F Trompenaars ,
E.G.T. Bosch  and
R.T.J.P Geurts
J.J.L. Mulders
Affiliation:
FEI Company, Achsteweg Noord 5, 5600MD Eindhoven, The Netherlands
P.H.F Trompenaars
Affiliation:
FEI Company, Achsteweg Noord 5, 5600MD Eindhoven, The Netherlands
E.G.T. Bosch
Affiliation:
FEI Company, Achsteweg Noord 5, 5600MD Eindhoven, The Netherlands
R.T.J.P Geurts
Affiliation:
FEI Company, Achsteweg Noord 5, 5600MD Eindhoven, The Netherlands

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1142 - 1143
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Kieft, E & Bosch, E J. Phys. D: Appl. Phys. 41 (2008), p. 215310.Google Scholar