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The New EF-TEM with OMEGA and FEG

Published online by Cambridge University Press:  02 July 2020

T. Oikawa ,
M. Kawasaki ,
T. Kaneyama ,
Y. Ohkura  and
M. Naruse
T. Oikawa
Affiliation:
JEOL Ltd., Tokyo, 196-8558, Japan
M. Kawasaki
Affiliation:
JEOL USA, Inc., 11 Dearborn Road, Peabody, MA, 01960
T. Kaneyama
Affiliation:
JEOL Ltd., Tokyo, 196-8558, Japan
Y. Ohkura
Affiliation:
JEOL Ltd., Tokyo, 196-8558, Japan
M. Naruse
Affiliation:
JEOL Ltd., Tokyo, 196-8558, Japan
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Abstract

Recently, energy filtering technique in the transmission electron microscopy (EF-TEM) is becoming widely used in both materials and biological science.

In this paper, newly developed EF-TEMs for both 200 kV (JEM-2010FEF) and 300 kV (JEM- 3100FEF) are introduced. Figure 1 shows appearances of the instruments. Those instruments have a field emission gun and an OMEGA type spectrometer.

The features of JEM-2010FEF and JEM-3100FEF EF-TEMs are as follows [1,2]:

1. 3 pre-filter lenses and 3 post-filter lenses are used.

Additional intermediate lens is employed for covering filtered images in low magnification range from x200 - x 1,500,000 magnification for JEM-2010FEF, x200 - x2,000,000 for JEM- 3100FEF. in diffraction mode, from 200 mm - 2,000 mm in camera length for JEM- 2010F, 200 mm- 1,500 mm are covered for JEM-3100FEF.

2. Large energy dispersion.

The energy dispersion is 1.2 μm/eV at 200 kV and 0.85 μm/eV at 300 kV.

Type
EELS Microanalysis At High Sensitivity: Advances in Spectrum Imaging, Energy Filtering and Detection (Organized by R. Leapman and J. Bruley)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 1128 - 1129
Copyright
Copyright © Microscopy Society of America 2001

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References

[1] Kaneyama, T.et al.,: Proc. 14th ICEM (Cancun) (1998), Vol. 1, 235.Google Scholar

[2] Y. Bandet al.,: Proc. Microscopy & Microanalysis 2000 (Philadelphia) (2000), 200.Google Scholar