Hostname: page-component-848d4c4894-xfwgj Total loading time: 0 Render date: 2024-07-07T13:21:18.616Z Has data issue: false hasContentIssue false
  • English
  • Français

The NanoWorkstation: Complementing FIB-SEM Tools with Micromanipulators

Published online by Cambridge University Press:  01 August 2018

Andrew J. Smith ,
Andreas Rummel ,
Matthias Kemmler ,
Klaus Schock  and
Stephan Kleindiek
Andrew J. Smith
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Andreas Rummel
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Matthias Kemmler
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Klaus Schock
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany
Stephan Kleindiek
Affiliation:
Kleindiek Nanotechnik, Reutlingen, Germany

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 24 , Supplement S1: Proceedings of Microscopy & Microanalysis 2018 , August 2018 , pp. 846 - 847
Copyright
© Microscopy Society of America 2018 

References

[1] Burkhardt, C., et al, ESREF 2002.Google Scholar
[2] Rösler, J, Mukherji, D, Schock, K Kleindiek, S Nanotechnology 18 2007) p. 125303.Google Scholar
[3] Kleindiek, S US Patent US5568004 A (1996).Google Scholar
[4] Lin, Y, Li, Q, Armstrong, A Wang, GT Solid State Communications 149 2009) p. 1608.Google Scholar