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Nanofabrication with a High Resolution Helium Ion Beam

Published online by Cambridge University Press:  01 August 2010

E van Veldhoven ,
V Sidorkin ,
P Chen ,
P Alkemade ,
E van der Drift ,
H Salemink ,
HW Zandbergen  and
D Maas
E van Veldhoven
Affiliation:
Van Leeuwenhoek Laboratory, The Netherlands
V Sidorkin
Affiliation:
Delft University of Technology, The Netherlands
P Chen
Affiliation:
Delft University of Technology, The Netherlands
P Alkemade
Affiliation:
Delft University of Technology, The Netherlands
E van der Drift
Affiliation:
Delft University of Technology, The Netherlands
H Salemink
Affiliation:
Delft University of Technology, The Netherlands
HW Zandbergen
Affiliation:
Delft University of Technology, The Netherlands
D Maas
Affiliation:
Van Leeuwenhoek Laboratory, The Netherlands

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 202 - 203
Copyright
Copyright © Microscopy Society of America 2010