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Multi-beam Electron Microscopy: Principles and Applications

Published online by Cambridge University Press:  25 July 2016

Anna Lena Eberle  and
Dirk Zeidler
Anna Lena Eberle
Affiliation:
Carl Zeiss Microscopy GmbH, Carl-Zeiss-Str. 22, Oberkochen, Germany
Dirk Zeidler
Affiliation:
Carl Zeiss Microscopy GmbH, Carl-Zeiss-Str. 22, Oberkochen, Germany

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 584 - 585
Copyright
© Microscopy Society of America 2016 

References

[1] Mohammadi-Gheidari, A. & Kruit, P. Nucl. Instrum. Methods 645, 60 (2011).Google Scholar
[2] Eberle, A. L., et al., J. Microsc. 259, 114 (2015).Google Scholar
[3] The authors thank B. Thiel, M. Malloy, S. Halder, P. Leray, C. Nakakura, J. Michaels, and R. Schalek for insightful discussions.Google Scholar