Hostname: page-component-76fb5796d-45l2p Total loading time: 0 Render date: 2024-04-26T18:25:30.326Z Has data issue: false hasContentIssue false
  • English
  • Français

Monochromatic non-immersion FEG SEM

Published online by Cambridge University Press:  23 November 2012

D. Phifer ,
P. Wandrol ,
B. Sed'a ,
P. Dostál ,
J. Pavliš ,
T. Janočko ,
T. Vystavěl ,
L. Tuma  and
M. Castagna
D. Phifer
Affiliation:
Materials Science Business Unit, FEI Company, Eindhoven, Netherlands
P. Wandrol
Affiliation:
FEI Company, Brno, Czech Republic
B. Sed'a
Affiliation:
FEI Company, Brno, Czech Republic
P. Dostál
Affiliation:
FEI Company, Brno, Czech Republic
J. Pavliš
Affiliation:
FEI Company, Brno, Czech Republic
T. Janočko
Affiliation:
FEI Company, Brno, Czech Republic
T. Vystavěl
Affiliation:
FEI Company, Brno, Czech Republic
L. Tuma
Affiliation:
FEI Company, Brno, Czech Republic
M. Castagna
Affiliation:
FEI Company, Portland, OR
Get access

Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 1282 - 1283
Copyright
Copyright © Microscopy Society of America 2012

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)