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Meso-Structure Study of a Porous SiO2 Thin Film on (001) Si by Transmission Electron Microscopy

Published online by Cambridge University Press:  22 July 2003

X. Wu
Affiliation:
Institute for Microstructural Science
K. Yu
Affiliation:
Steacie Institute for Molecular Sciences National Research Council of Canada, Ottawa, Ontario K1A 0R6 Canad

Abstract

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Abstract
Copyright
Copyright © Microscopy Society of America 2003