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Measurement of the Point Spread Function for Low-Loss Inelastic Scattering

Published online by Cambridge University Press:  05 August 2019

R.F. Egerton ,
A.M. Blackburn ,
R.A. Herring ,
L. Wu  and
Y. Zhu
R.F. Egerton*
Affiliation:
Physics Department, University of Alberta, Edmonton, CanadaT6G 2E1.
A.M. Blackburn
Affiliation:
CAMTEC, University of Victoria, CanadaV8W 2Y2.
R.A. Herring
Affiliation:
Microscopy Facility, University of Victoria, CanadaV8W 2Y2.
L. Wu
Affiliation:
Materials Science, Brookhaven National Laboratory, Upton, NY 11973, USA.
Y. Zhu
Affiliation:
Materials Science, Brookhaven National Laboratory, Upton, NY 11973, USA.
*
*Corresponding author: regerton@ualberta.ca

Abstract

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Type
Current Trends and Challenges in Electron Energy-Loss Spectroscopy
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 676 - 677
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Han, G. and Cerina, F., J. Vac. Sci. Technol. B 18 (2000) 3297.Google Scholar
[2]Silvis-Cividjian, N., Hagen, C.W., Kruit, P., J. Appl. Phys. 98 (2005) 084905.Google Scholar
[3]Crozier, P.A., J. Vac. Sci. Technol B 26 (2008) 249.Google Scholar
[4]Egerton, R.F., Microscopy (2018) i52-i59, doi: 10.1093/jmicro/dfx089Google Scholar
[5]The authors acknowledge funding the Natural Sciences and Engineering Research Council of Canada.Google Scholar