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Measurement of Downstream Charge Transport During Plasma Cleaning of Vacuum Chambers
Published online by Cambridge University Press: 27 August 2014
Abstract
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- Abstract
- Information
- Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1132 - 1133
- Copyright
- Copyright © Microscopy Society of America 2014
References
[1] Langmuir probe data in oxygen-containing plasmas are fraught with artifactual content and thus difficult to interpret, thus hydrogen was used as a proxy.Google Scholar
[3] That is, inelastic MFP is the mean travel distance until an inelastic collision occurs. Typical gases used in plasma cleaning are dominated by elastic gas phase collisions that serve mainly to scatter cleaning species in a diffusive manner.Google Scholar