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Measurement of Downstream Charge Transport During Plasma Cleaning of Vacuum Chambers

Published online by Cambridge University Press:  27 August 2014

C. A. Moore
C. A. Moore*
Affiliation:
XEI Scientific, Redwood City, CA, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 1132 - 1133
Copyright
Copyright © Microscopy Society of America 2014 

References

[1] Langmuir probe data in oxygen-containing plasmas are fraught with artifactual content and thus difficult to interpret, thus hydrogen was used as a proxy.Google Scholar
[2] Moore, C.A. Sematech Workshop on Nanodefects, Albany, NY, November 2012.Google Scholar
[3] That is, inelastic MFP is the mean travel distance until an inelastic collision occurs. Typical gases used in plasma cleaning are dominated by elastic gas phase collisions that serve mainly to scatter cleaning species in a diffusive manner.Google Scholar