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Low-Voltage Dark-Field STEM Imaging with Optimum Detection Angle

Published online by Cambridge University Press:  31 July 2006

A Morikawa ,
C Kamiya ,
S Watanabe ,
M Nakagawa  and
T Ishitani
A Morikawa
Affiliation:
Hitachi High-Technologies Corporation,Japan
C Kamiya
Affiliation:
Hitachi High-Technologies Corporation,Japan
S Watanabe
Affiliation:
Hitachi High-Technologies Corporation,Japan
M Nakagawa
Affiliation:
Hitachi High-Technologies Corporation,Japan
T Ishitani
Affiliation:
Hitachi High-Technologies Corporation,Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2005

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 1368 - 1369
Copyright
© 2006 Microscopy Society of America