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A Low Cost EBSD System: Implementation and Application

Published online by Cambridge University Press:  02 July 2020

Xavier Pierron ,
Charles Daghlian  and
Ian Baker
Xavier Pierron
Affiliation:
Special Metals, Technology Division, New Hartford, NY
Charles Daghlian
Affiliation:
Dartmouth College, Thayer School of Engineering, Hanover, NH
Ian Baker
Affiliation:
Dartmouth College, Thayer School of Engineering, Hanover, NH
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Electron Back-Scatter Diffraction (EBSD) is a technique used for obtaining microtextural information from bulk samples in the scanning electron microscope (SEM). number of good commercial systems provide hardware and software to acquire and analyze the electron back scatter patterns (EBSP). The systems come with tools to visualize crystal orientation, and map grain and grain boundaries. However money is always in short supply, and for studies which do not require mapping, we have found it more economical to build our own EBSP system using readily available off-the-shelf components.

An EBSP's are formed by the intersection of the diffracted back scattered electrons with a phosphor screen placed in their path. We acquire this pattern by viewing the phosphor.screen through a view port with a CCD video camera which is configured for on-chip integration. On-chip integration allows the signal to be amplified without extensive electronic noise. We made a port cover for the right-hand port of the DSM-962 SEM on which a 2” diameter view window is fitted.

Type
Electron diffraction in the SEM: automated EBSP and its application
Information
Microscopy and Microanalysis , Volume 5 , Issue S2: Proceedings: Microscopy & Microanalysis '99, Microscopy Society of America 57th Annual Meeting, Microbeam Analysis Society 33rd Annual Meeting, Portland, Oregon August 1-5, 1999 , August 1999 , pp. 244 - 245
Copyright
Copyright © Microscopy Society of America

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References

references

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