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Large volume 3D characterization by plasma FIB DualBeam microscopy

Published online by Cambridge University Press:  23 September 2015

T L Burnett ,
R Kelley ,
B Winiarski ,
M Daly ,
K Mani  and
P J Withers
T L Burnett
Affiliation:
The University of Manchester, Materials Department, Manchester, M13 9PL, UK FEI Company, Achtseweg Noord 5, Bldg 5651 GG, Eindhoven, The Netherlands
R Kelley
Affiliation:
FEI Company, 5350 Northeast Dawson Creek Drive, Hillsboro, OR 97124, USA
B Winiarski
Affiliation:
The University of Manchester, Materials Department, Manchester, M13 9PL, UK FEI Company, Achtseweg Noord 5, Bldg 5651 GG, Eindhoven, The Netherlands
M Daly
Affiliation:
The University of Manchester, Materials Department, Manchester, M13 9PL, UK
K Mani
Affiliation:
FEI Company, 5350 Northeast Dawson Creek Drive, Hillsboro, OR 97124, USA
P J Withers
Affiliation:
The University of Manchester, Materials Department, Manchester, M13 9PL, UK

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 2003 - 2004
Copyright
Copyright © Microscopy Society of America 2015 

References

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