In this talk, the development of key elements for BioPOEMS (Biomedical Polymer-based Opto Electro Mechanical Systems) will be discussed as a new generation of microscopic and microanalysis biochips. Current BioMEMS (Biomedical Microelectromechanical Systems) technology is in its infancy stage. Just as silicon-based microelectronics technology went through many stages since the late ‘60's, BioMEMS technology will have to overcome many obstacles before becoming a mature industry. The IC industry was made possible by the development of fabrication processes, integration technologies, and design tools. Similarly, the field of BioMEMS must prepare new components with biomaterials and tools for the development of new microsystems, enabling the combination of biological sensors and actuators with the rapidly growing capabilities of bioinformatics.

Polymers are not only used in macroscopic systems, but are now increasingly finding use in the microscopic realm such as microfluidic devices. Among the many different classes of polymers, it is the fluoropolymers that provide the most unique material characteristics.