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Ion-induced Auger Electron Spectroscopy as a Potential Route to Chemical Focused-Ion Beam Tomography

Published online by Cambridge University Press:  27 August 2014

Hamed Parvaneh  and
Robert Hull
Hamed Parvaneh
Affiliation:
Department of Materials Science and Engineering, Rensselaer Polytechnic Institute, Troy, New York 12180, USA
Robert Hull
Affiliation:
Department of Materials Science and Engineering, Rensselaer Polytechnic Institute, Troy, New York 12180, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 310 - 311
Copyright
Copyright © Microscopy Society of America 2014 

References

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