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The Investigation of Chemical Shift of Silicon X-ray Energy in Different Stoichiometry or Structure with Microcalorimeter EDS

Published online by Cambridge University Press:  25 July 2016

LiLung Lai ,
Matthew H. Carpenter ,
Robin Cantor  and
Hideo Naito
LiLung Lai
Affiliation:
Semiconductor Manufacturing International (Shanghai) Corp, SH, China
Matthew H. Carpenter
Affiliation:
STAR Cryoelectronics, Santa Fe, NM, USA
Robin Cantor
Affiliation:
STAR Cryoelectronics, Santa Fe, NM, USA
Hideo Naito
Affiliation:
H.K.N. Inc. Nanotechnology Marketing, CA, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 432 - 433
Copyright
© Microscopy Society of America 2016 

References

References:

[1] Wollman, D.A., et al., Elec. Dev. Fail. Anal. News (Vol. 2. 4 (2000) 1.Google Scholar
[2] Terauchi, M., et al., Microsc & Microanalysis 20 (2014) 692–697.Google Scholar
[3] Newbury, Dale E. Microsc & Microanalysis 12 (2006) 527–537.Google Scholar
[4] Terborg, R., et al., Microsc & Microanal 18(Suppl 2 (2012) 1060.Google Scholar
[5] Cantor, R. & Naito, H. Microsc & Microanal 20(Suppl 3 (2014) 1146.Google Scholar
[6] Jach, T., et al., Microsc & Microanal 10(Suppl 2 (2004) 1042.Google Scholar