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Influence of FIB-acceleration Voltage on Lateral Damage of Silicon based TEM samples

Published online by Cambridge University Press:  07 September 2007

U Muehle ,
J Steinhoff  and
L Hillmann
U Muehle
Affiliation:
Qimonda Dresden
J Steinhoff
Affiliation:
Qimonda Dresden
L Hillmann
Affiliation:
Qimonda Dresden
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Extract

Extended abstract of a paper presented at MC 2007, 33rd DGE Conference in Saarbrücken, Germany, September 2 – September 7, 2007

Type
Research Article
Information
Microscopy and Microanalysis , Volume 13 , Issue S03 , September 2007 , pp. 102 - 103
Copyright
Copyright © Microscopy Society of America 2007

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