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Influence of Beam Energy and Probe Size on the Process of Electron-Beam-Induced Deposition

Published online by Cambridge University Press:  31 July 2006

Z-Q Liu
Affiliation:
National Institute for Materials Science, Japan
K Mitsuishi
Affiliation:
National Institute for Materials Science, Japan
K Furuya
Affiliation:
National Institute for Materials Science, Japan

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Copyright
© 2006 Microscopy Society of America