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The Influence of Beam Convergence Angle on Channeling Effect during STEM/EDS Quantification of SiGe Concentration

Published online by Cambridge University Press:  25 July 2016

B. Fu ,
M. Gribelyuk ,
R. Scott ,
E. Chen  and
J. Riendeau
B. Fu
Affiliation:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY, USA
M. Gribelyuk
Affiliation:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY, USA
R. Scott
Affiliation:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY, USA
E. Chen
Affiliation:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY, USA
J. Riendeau
Affiliation:
GLOBALFOUNDRIES, 400 Stone Break Rd Extension, Malta, NY, USA

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 1618 - 1619
Copyright
© Microscopy Society of America 2016 

References

References:

[1] Kuhn, K. J., et al, ECS Transactions 33 (2010). p. 3.Google Scholar
[2] Lu, P., et al, Applied Physics Letters 102 (2013). p. 173111.Google Scholar
[3] Hübner, R., et al, Thin Solid Films 519 (2010). p. 203.Google Scholar
[4] Meisenkothe, F., et al, Microsc. Microanal. 15 (2009). p. 83.Google Scholar
[5] The authors are grateful to Pavel Potapov for his insightful discussions.Google Scholar