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Inelastic Electron Scattering Observation Using Energy Filtered Transmission Electron Microscopy for Silicon-Germanium Nanostructures Imaging.

Published online by Cambridge University Press:  01 August 2002

R. Pantel ,
S. Jullian  and
D. Dutartre
R. Pantel
Affiliation:
STMicroelectronics, 850 Rue Jean Monnet, Crolles F-38926 France
S. Jullian
Affiliation:
STMicroelectronics, 850 Rue Jean Monnet, Crolles F-38926 France
D. Dutartre
Affiliation:
STMicroelectronics, 850 Rue Jean Monnet, Crolles F-38926 France

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 1174 - 1175
Copyright
Copyright © Microscopy Society of America 2002