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Improving the STEM Spatial Resolution Limit

Published online by Cambridge University Press:  01 August 2018

Ondrej L. Krivanek
Affiliation:
Nion R&D, Kirkland, WA Department of Physics, Arizona State University, Tempe, AZ
Andrew L. Bleloch
Affiliation:
Nion R&D, Kirkland, WA
Niklas Dellby
Affiliation:
Nion R&D, Kirkland, WA
Tracy C. Lovejoy
Affiliation:
Nion R&D, Kirkland, WA
Chenglong Shi
Affiliation:
Nion R&D, Kirkland, WA School of Physics, Peking University, Beijing, China
Wu Zhou
Affiliation:
Laboratory of Vacuum Physics, University of Chinese Academy of Sciences, Beijing, China
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Abstract

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© Microscopy Society of America 2018 

References

[1] Batson, P.E., Dellby, N. Krivanek, O.L. Nature 418 2002) p. 617.CrossRefGoogle Scholar
[2] Krivanek, O.L., et al, Nature 464 2010) p. 571.CrossRefGoogle Scholar
[3] Krivanek, O.L., et al in Scanning Transmission Electron Microscopy (eds Pennycook S.J. and Nellist P.D. Springer. p. 613.Google Scholar
[4] Krivanek, , et al, Nature 514 2014) p. 209.CrossRefGoogle Scholar
[5] Nellist, P.D., et al, Science 305 2004) p. 1741.CrossRefGoogle Scholar
[6] Krivanek, O.L., et al, Ultramicroscopy 108 2008) p. 179.CrossRefGoogle Scholar
[8] Linck, M., et al, Phys. Rev. Letts 117 2016) p. 076101.CrossRefGoogle Scholar
[9] Sawada, H., et al, Phys. Rev. Letts 114 2015) p. 166102.CrossRefGoogle Scholar
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