Hostname: page-component-76fb5796d-qxdb6 Total loading time: 0 Render date: 2024-04-26T17:41:19.129Z Has data issue: false hasContentIssue false
  • English
  • Français

High Speed, Large Scan Area, Distortion Free Operation of a Single-Chip Scanning Probe Microscope

Published online by Cambridge University Press:  25 July 2016

N. Sarkar ,
G. Lee ,
D Strathearn ,
M. Olfat  and
R.R. Mansour
N. Sarkar
Affiliation:
University of Waterloo, Waterloo, Canada ICSPI Corp., Waterloo, Canada
G. Lee
Affiliation:
University of Waterloo, Waterloo, Canada ICSPI Corp., Waterloo, Canada
D Strathearn
Affiliation:
University of Waterloo, Waterloo, Canada ICSPI Corp., Waterloo, Canada
M. Olfat
Affiliation:
University of Waterloo, Waterloo, Canada ICSPI Corp., Waterloo, Canada
R.R. Mansour
Affiliation:
University of Waterloo, Waterloo, Canada ICSPI Corp., Waterloo, Canada

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 372 - 373
Copyright
© Microscopy Society of America 2016 

References

REFERENCES:

[1] Sarkar, N., et al, “CMOS-MEMS atomic force microscope,” Proceedings of Transducers 2011.CrossRefGoogle Scholar
[2] Barret, R.C. & Quate, C. JVST B 9(2 (1991). pp. 302–306.Google Scholar
[3] Ando, T., et al, Proc. Natl. Acad. Sci v98, n22 2001). pp. 12468–12472.CrossRefGoogle Scholar
[4] Bozchalooi, ■., et al, Ultramicroscpy v160 (2016) p213.CrossRefGoogle Scholar
[5] Strathearn, D., et al, Proceedings of Transducers 2015.Google Scholar
[6] Sarkar, N., et al, proceedings of MEMS 2016.Google Scholar