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High Spatial Resolution EBSD Study of Nanosized Epitaxial Particles

Published online by Cambridge University Press:  02 July 2020

F. Cosandey
F. Cosandey*
Affiliation:
Department of Ceramic and Materials Engineering, Rutgers University, Piscataway, NJ, 08855-0909
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Extract

Traditionally, the structure and orientation relationship of individual catalyst particles on various oxide substrates have been studied by transmission electron microscopy. However, the combination of high resolution scanning electron microscopes (HRSEM) equipped with Schottky field emission sources with CCD cameras for recording electron backscatter diffraction (EBSD) paterns, it is now possible to obtain both morpholgy and orientation of individual particles with high spatial resolution. In this paper, we present results on the application of combined EBSD with HRSEM to determine the epitaxial orientation relationship of 80 nm Au particles on TiO2 (110). An evaluation of the spatial resolution limit of EBSD using Monte Carlo simulation of backscattered electron trajectories is also presented.

The TiO2 (110) single crystal surfaces used in this study were prepared in UHV using surface science tools followed by in-situ metallization. After deposition of 15 nm Au at 300K followed by annealing at 800K, the samples were transferred in air to the Field Emission Scanning Electron microscope (LEO 982 Gemini) for high resolution imaging.

Type
Materials Science Applications of Microdiffraction Methods in the SEM
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 559 - 560
Copyright
Copyright © Microscopy Society of America 1997

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References

1.Rupprechter, G., Hayek, K., Rendón, L.José-Yacamán, m., Thin Solid Films 260 (1995) 14810.1016/0040-6090(94)06429-6CrossRefGoogle Scholar
2.Cosandey, F., Persaud, R, Zhang, L. and Madey, T. E., MRS Proceedings, 440 (1997)Google Scholar
3. The Monte Carlo program was provided by P. Manwaring of Oxford InstrumentsGoogle Scholar
4.Thanks to T. E. Madey and R. Persaud for numerous discussions and for providing the samples used in this studyGoogle Scholar